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商品介绍
Air Bearing stage |
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3. Single Plane Type |
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Product Type : Air Bearing Guide
Material : Granite Base
Drive : Coreless Linear Servo Motor
Shock Absorbing Desk : Active Isolator
Stage Size : Ø300mm Sic Wafer Vacuum Chuck
Stroke (mm/full stroke) :
Y1/Y2 → 400 , X1 → 350
Flatness : ±1µm
Resolution : 0.5 nm/count
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Single Plane Type Air Bearing Stage
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