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商品介绍
Air Bearing stage |
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2. Split Type |
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Product Type : Y1 → Air Bearing Guide, X1 → LM Guide
Material : Granite Base
Drive : Coreless Linear Servo Motor
Shock Absorbing Desk : Passive Isolator
Stroke (mm/full stroke) : Y → 2,280 , X → 1,240
Stage Size :
1,940mm(X)×1,120mm(Y) (Vacuum chuck size)
Flatness : ±3µm
Resolution : 1.22 nm/count
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Split Type Air Bearing Stage
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