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商品介绍
Air Bearing stage |
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1. Gantry Type |
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Product Type : Air Bearing Guide
Material : Granite Base
Drive : Coreless Linear Servo Motor
Shock Absorbing Desk : Active Isolator
Stage Size : 1,140mm(X) x 1,740mm(Y)
Stroke (mm/full stroke) :
Y1/Y2 → 2,950 , HX1/HX2 → 1,670
Flatness : ±5µm
Resolution : 0.5 nm/count
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Gantry Type Air Bearing Stage
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